| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that the conventional secondary electron emission rate measuring instrument is in a large scale including a charged particle generation source; a sample holder, an incident current measuring instrument; a radiation electron current measuring instrument; and an apparatus for controlling them although the measurement of secondary electron emission rate is essential to the development of a plasma display or the like. <P>SOLUTION: The secondary electron emission rate measuring instrument is manufactured so that it includes an electrostatic lens 104 for narrowing charged particle rays and a reflection electrode 105 for reflecting unneeded incident electrons, and is installed in a vacuum container, thus providing an inexpensive and compact measuring instrument as compared with the conventional measuring instrument and measuring secondary electron emission rate easily regardless of the type of a charged particle generator. <P>COPYRIGHT: (C)2004,JPO</p> |
