| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser patterning method in order to solve a problem such that a variation in laser output causes a variation in machining accordingly of which the fluctuation in turn fluctuates a variation in the width of machined grooves. <P>SOLUTION: Microgrooves are formed at a transparent electrode of≤1μm in thickness formed on a front plate by irradiating a substrate with the laser beam of a pulse width below nanosecond. At this time, when the substrate is machined by causing the laser beam expanded and paralleled by a beam expander to pass through an aperture, then by condensing the laser beam by a condensing lens, the substrate is irradiated with the beam at an aperture diameter greater than the inflection point determined from the relation between the variation in the output of the laser beam, the shape ratio (the diameter after passage/the diameter before passage) before and after the passage through the aperture and the variation in the width of the machined grooves. <P>COPYRIGHT: (C)2004,JPO</p> |
