ELECTRON EMITTER, DRIVE CIRCUIT OF ELECTRON EMITTER, AND DRIVE METHOD OF ELECTRON EMITTER

摘要

PROBLEM TO BE SOLVED: To realize a longer-life and improvement in reliability by suppressing damage accompanied with emitting electrons at a cathode and an anode as for an electron emitter having an emitter part constituted of dielectrics.

SOLUTION: This element has the emitter part 14 formed on the substrate 12, the cathode 16 formed on one face of the emitter part 14, and the anode 20 which is formed also on one face of the emitter part 14 and which forms a slit 18 together with the cathode 16. Between the cathode 16 and the anode 20, a drive voltage Va from a pulse generation source 22 is applied. The anode 20 is considered as the earth. Then, width d of the slit 18 is set as 0.1μm to 50μm.

COPYRIGHT: (C)2004,JPO