| 摘要 |
PROBLEM TO BE SOLVED: To provide a weighing device for a delivery functional liquid for measuring the weight of the functional liquid with high precision, and a liquid drop delivery device equipped with this device, without spoiling the handling ability of a receiving receptacle and the reusability of the functional liquid. SOLUTION: The weighing device 24 for a delivery functional liquid which measures the weight of the functional liquid delivered from a functional liquid drop delivery head 30, is provided with the receiving receptacle 111 for receiving the functional liquid delivered from the delivery head 30, and a measurement means 113 for measuring the weight of the functional liquid delivered via the receiving receptacle 111. The receiving receptacle 111 is filled up with functional liquid absorbing material 152 for absorbing and keeping the functional liquid delivered into the receptacle. COPYRIGHT: (C)2004,JPO |
