PREPARATION METHOD OF FERROELECTRIC SINGLE CRYSTAL MEMBRANE STRUCTURE

摘要

PURPOSE: A preparation method of a ferroelectric single crystal membrane structure is provided to enhance a performance of an element or member containing a ferroelectric thin film or thick film. CONSTITUTION: The preparation method of a ferroelectric single crystal membrane structure comprises forming a conductive metal layer and a substrate layer(4) on one side of the ferroelectric single crystal thin plate, in order by a vacuum evaporation. The preparation method also comprises grinding the single crystal thin plate after forming the substrate layer. The preparation method also comprises forming a layer of a material selected from SiO2, MgO, Al2O3 and ZnO before forming the substrate layer.