Isolated micro pressure sensor and method for making the same

摘要

A method for producing an isolated micro pressure sensor and the process for producing the same are disclosed. The method for manufacturing the isolated micro pressure sensor includes: (A) etching one surface of a substrate to form a rampart with an open cavity on the center of its top surface and with plate portions surrounding the rampart; (B) forming a plurality of first contact pads on said plate portions of the substrate outside said rampart; (C) forming a plurality of second contact pads, a plurality of piezo-resistors, thermo sensors, temperature-controlling elements and circuit patterns on a bulk silicon wafer; (D) forming a plurality of grooves on the periphery of the bulk silicon wafer; (E) bonding the bulk silicon wafer and the substrate; and (F) thinning said bulk silicon wafer until said bulk silicon wafer forming a thin membrane.