| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To resolve the problems wherein, by a PAS (pressure swing adsorption) method, a device becomes large, has difficulties in maintenance of the device like a solenoid valve, while by a membrane separating method, the purity of nitrogen is 95-99.9% and not suitable to a high purity needs, and by a supercooled separation method, nitrogen with high purity of 99.999% or more is obtained whereas needing a large scale facility. <P>SOLUTION: In this production apparatus of nitrogen gas, a first heat exchanger 30 for heating compressed air, a hollow fiber membrane type nitrogen gas generator 40 eliminating oxygen from the compressed air, and an oxygen absorber 70 for absorbing oxygen in the compressed air, are disposed to make the compressed air flow in this order. <P>COPYRIGHT: (C)2004,JPO</p> |
