| 摘要 |
PROBLEM TO BE SOLVED: To prevent dielectric breakdown from being easily generated while shielding an electric field from a wiring layer. SOLUTION: A floating electrode 201 is electrostatically coupled with an electrode 202 through an electrostatic capacitor C1, the floating electrode 201 is electrostatically coupled with an electrode 203 through an electrostatic capacitor C2, and an electrode 200 is electrostatically coupled with the floating electrode 201 through an electrostatic capacitor C3. The potential of the floating electrode 201 is lower than potential impressed to the electrode 200. The electrode 201 covers the upper part of the electrode 200. For instance, it is desirable to set elevation anglesα,βobtained by observing the ends with widthwise direction of the electrode 201 from the ends of the widthwise direction of the electrode 200 in a cross-sectional view are≤45°. COPYRIGHT: (C)2004,JPO |
