| 摘要 |
PROBLEM TO BE SOLVED: To effectively restrain hunting of chamber pressure control means. SOLUTION: This chamber pressure control system has the chamber pressure control means 6B, 9A and 9B for adjusting chamber pressure (p) of an object chamber 1 to target chamber pressure ps by adjusting a balance between an air supply quantity and an air exhaust quantity to the object chamber 1, and is provided with a system preserving means 11 for changing an operation characteristic of the chamber pressure control means 6B, 9A and 9B to another characteristic from a present characteristic when the hunting is caused by detecting generation of the hunting H in the chamber pressure control means 6B, 9A and 9B. COPYRIGHT: (C)2004,JPO |
