发明名称 SHEET FOR THIN FILM TRANSISTOR AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sheet for a thin film transistor whose cost can be reduced by removing the patterning process of a semiconductor active layer using a simple method. SOLUTION: In the sheet for the thin film transistor, at least a gate bus line, a source bus line, a source electrode, a drain electrode, and a semiconductor active layer are formed on a sheetlike support. The semiconductor active layer is subjected to processing so as to be substantially parted on the gate bus line, after the semiconductor active layer is formed on the whole surface. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004179478(A) 申请公布日期 2004.06.24
申请号 JP20020345355 申请日期 2002.11.28
申请人 KONICA MINOLTA HOLDINGS INC 发明人 HIRAI KATSURA
分类号 H01L21/76;H01L21/336;H01L29/786;H01L51/00;H01L51/05;H01L51/40;(IPC1-7):H01L21/336 主分类号 H01L21/76
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