CLUSTER TYPE ASHER EQUIPMENT USED FOR MANUFACTURE OF SEMICONDUCTOR DEVICE

摘要

Disclosed is asher equipment used for manufacture of a semiconductor device, including a transfer module which is provided with a substrate transfer robot capable of simultaneously transferring at least two substrates and being defined with process chambers. A buffer stage is arranged in a manner such that, before introduction of the wafers into the respective process chambers, alignment and OCR processes can be implemented in a standby state of the wafers which is to be transferred to be introduced into the respective process chambers by the substrate transfer robot.