| 摘要 |
<p>A massflow controller (3) and block valves (2,4) are each fastened to block couplings (41,42,43) adjacent to each other by screw members (27,A1-A6) screwed in from above like a bridge and are thereby made removable upward. The block couplings (41,42,43) are fastened to a base plate by screw members (45,B1-B7) left uncovered with the fluid control members when seen from above. <IMAGE></p> |
