ACTUATOR AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an actuator where flatness is small and inplane dispersion of a d-constant is small and to provide a manufacturing method of the actuator.

SOLUTION: The actuator 1 is provided with a piezoelectric substrate 2 formed of a piezoelectric porcelain, surface electrodes 6 arranged in a part of the main face of the piezoelectric substrate 2 and an inner electrode 5 disposed inside the piezoelectric substrate 2. Flatness of the main face of the piezoelectric substrate 2 is not more than 20μm and whole thickness T is not more than 100μm.

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