| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern forming method capable of forming a desired pattern simply and accurately. SOLUTION: A sheet type film 1 having a thermoplastic resin or hot-melt resin layer 2 is contacted closely to a substrate 3 so as to pinch the resin layer 2, then, a grooved heat roll 4 is pushed against the upper side of the film 1 under the closely contacted condition while rotating the roll 4 and oscillating the roll 4 by ultrasonic wave whereby the resin layer 2 is transferred from the film 1 to the substrate 3 with the shape of a pattern. The necessitated pattern is directly formed on the substrate whereby the number of process is reduced compared with the pattern forming through a conventional photolithographic method and, further, the pattern can be formed simply and accurately on the substrate compared with the other methods. COPYRIGHT: (C)2004,JPO
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