CHEMICAL DELIVERY SYSTEM HAVING PURGE SYSTEM UTILIZING MULTIPLE PURGE TECHNIQUES
摘要
A chemical delivery system (500) which utilizes a purge technique which may utilize a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system (506). Also a chemical delivery system is disclosed that may be provided with a heater system for heating the chemical delivery system.
申请公布号
WO9964780(A9)
申请公布日期
2004.06.24
申请号
WO1999US12648
申请日期
1999.06.04
申请人
ADVANCED DELIVERY & CHEMICAL SYSTEMS, LTD.;GREGG, JOHN, N.;NOAH, CRAIG, M.;JACKSON, ROBERT, M.
发明人
GREGG, JOHN, N.;NOAH, CRAIG, M.;JACKSON, ROBERT, M.