ELECTROSTATIC ACTUATOR, LIQUID DROP EJECTION HEAD AND ITS MANUFACTURING PROCESS, INK CARTRIDGE, INK JET RECORDER, MICROPUMP, OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To solve a problem that a desired displacement of a diaphragm cannot be attained or displacement of the diaphragm is varied. SOLUTION: An actuator substrate 11 comprises a diaphragm 22, and an electrode 24 facing the diaphragm 22 through an air gap 23. The air gap 23 is made by etching a sacrifice layer and a hole 41 for removing the sacrifice layer is sealed with a part 38a of a resin film 38 constituting the diaphragm 22 such that the part 38a of the resin film 38 does not enter the air gap 23. COPYRIGHT: (C)2004,JPO