发明名称 |
Electron beam sensor |
摘要 |
A sensing device for sensing an electron beam includes a vacuum chamber having an electron permeable window for allowing electrons from the electron beam to enter vacuum chamber. An electrode extends within the vacuum chamber for receiving at least a portion of the electrons entering the vacuum chamber. The intensity of the electron beam is capable of being determined from the amount of electrons received by the electrode.
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申请公布号 |
US2004119024(A1) |
申请公布日期 |
2004.06.24 |
申请号 |
US20020326923 |
申请日期 |
2002.12.19 |
申请人 |
ADVANCED ELECTRON BEAMS, INC. |
发明人 |
AVNERY TZVI |
分类号 |
H01J37/244;(IPC1-7):H01J37/244 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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