DRIVING OF AN ARRAY OF MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) ELEMENTS

摘要

Method for driving an array of micro-electro mechanical system (MEMS) devices, said array providing a plurality of logical or memory states at it output, wherein the MEMS devices are given a characteristic hysteresis curve differing from one MEMS device to another MEMS device, and wherein a single control voltage applied to all the MEMS devices while the various states of the array are to be obtained by varying the single control voltage.