PLATING BATH COMPOSITION CONTROL

摘要

A method of plating bath composition control. The method may include analysis of a plating bath to determine byproduct concentrations and changing the composition of the plating bath as a result thereof. Additionally, plating bath solution may be circulated between reservoirs before, during, or after the analysis and the changing of the composition. Methods may be carried out with use of a system having separate reservoirs, an analyzer, and a dosing controller for the changing of the composition.