LASER MARKING METHOD OF IDENTIFICATION CODE AND DEVICE, ESPECIALLY REGARDING TO EXPOSING AN IDENTIFICATION CODE FOR HISTORY MANAGEMENT OR QUALITY CONTROL TO A PHOTORESIST SUBSTRATE BY LASER BEAM OR COUNTERMARKING THE IDENTIFICATION CODE ON A SUBSTRATE SUCH AS A WAFER

摘要

PURPOSE: A laser marking method of an identification code and a device are provided to form dots for configuring a 2-dimensional code by 2-axial sound optical deflectors, consequently the 2-dimensional code having an excellent readout rate can be marked since dot positions are not scattered inside the 2-dimensional code. CONSTITUTION: A laser beam(2) outputted from a laser oscillator(1) is incident on an X sound optical deflector(3) after controlling a predetermined beam diameter or a collimation. The laser beam(2) incident on the X sound optical deflector(3) is outputted as a deflected laser beam(4) by a frequency of an X apply electric signal. The laser beam(4) is incident on a Y sound optical deflector(5), deflected by a frequency of a Y apply electric signal, and is outputted as a laser beam(6).