| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To recover a high purity and recyclable fluorine compound having no sulfur component mixed, and further recover a sulfur compound separately by selectively taking out only the fluorine component from an exhaust gas in treatment of the exhaust gas containing fluorine and sulfur such as SF<SB>6</SB>. <P>SOLUTION: H<SB>2</SB>gas or a compound containing hydrogen is added to an exhaust gas containing fluorine and sulfur, and the exhaust gas is decomposed to form HF. The formed HF is fixed by bringing it into contact with an absorbent such as sodium hydrogencarbonate. In this case, the fixation is performed by keeping a temperature at which the absorbent does not react with a sulfur compound formed together with HF, but reacts solely with HF. Alternatively, the formed HF is dissolved solely in water to selectively remove the fluorine compound from the exhaust gas. <P>COPYRIGHT: (C)2004,JPO</p> |
