| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently perform gas substitution in a pellicle space or to efficiently maintain the environment within the pellicle space when conveying an original plate with a pellicle. <P>SOLUTION: A pair of forks 31 of a reticle hand are equipped with emission parts 35 for emitting inert gases, the inert gases are emitted from the emission parts 35, and the inert gases are fed into a pellicle space 29 via air holes 27 of a reticle 30 with the pellicle. In such a state, the reticle 30 with the pellicle is conveyed. <P>COPYRIGHT: (C)2004,JPO</p> |
