METHOD AND RESULTING DEVICE FOR FABRICATING ELECTRET MATERIALS ON BULK SUBSTRATES

摘要

An electret device. The device has a thickness of substrate material (101) having a contact region (107). An electrically floating conducting region (111) is formed overlying the thickness of substrate material (101). A protective layer (113) is formed overlying the floating conductive layer (111). The protective layer (113) has a surface region and seals the floating conducting region (111). The thickness of substrate material (101), floating conducting region (111), and protective layer (113) form a sandwiched structure having a charge density of at least 1 X 10<-4> Coulombs/m<2> and a peak to peak charge uniformity of 5 % and less.