| 发明名称 |
Method for producing ferroelectric film element, and ferroelectric film element and ferroelectric memory element produced by the method |
| 摘要 |
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| 申请公布号 |
EP0766292(B1) |
申请公布日期 |
2004.06.23 |
| 申请号 |
EP19960306608 |
申请日期 |
1996.09.12 |
| 申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
USHIKUBO, MAHO;ITO, YASUYUKI;YOKOYAMA, SEIICHI;MATSUNAGA, HIRONORI;KOBA, MASAYOSHI |
| 分类号 |
H01G4/33;H01L21/02;H01L21/314;H01L21/316;H01L21/8242;H01L21/8246;H01L21/8247;H01L27/10;H01L27/105;H01L27/108;H01L29/788;H01L29/792;H01L29/92;H01L37/02;H01L41/09;H01L41/187;(IPC1-7):H01L21/320;H01L27/115 |
主分类号 |
H01G4/33 |
| 代理机构 |
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