| 发明名称 |
Flowmeter element using thin films and use |
| 摘要 |
Flow sensor element comprises a temperature measuring element (2) and a heating element (3) each having a metallic support foil (2c, 3c) with an electrically insulating coating. Platinum thin film resistors (2a, 3a) are formed on the coating.
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| 申请公布号 |
EP1431718(A2) |
申请公布日期 |
2004.06.23 |
| 申请号 |
EP20030023484 |
申请日期 |
2003.10.18 |
| 申请人 |
HERAEUS SENSOR TECHNOLOGY GMBH |
发明人 |
WIENAND, KARLHEINZ, DR.;ULLRICH, KARLHEINZ, DR.;MUZIOL, MATTHIAS |
| 分类号 |
G01P13/00;G01F1/692;(IPC1-7):G01F1/692 |
主分类号 |
G01P13/00 |
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