WAFER CASSETTE TRANSPORT CART WITH SELF CORRECTING FAULT ALIGNMENT BLOCK AND METHOD,申请号EP20020773460-传众专利搜索

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发明名称	WAFER CASSETTE TRANSPORT CART WITH SELF CORRECTING FAULT ALIGNMENT BLOCK AND METHOD
摘要
申请公布号	EP1430515(A2)	申请公布日期	2004.06.23
申请号	EP20020773460	申请日期	2002.09.18
申请人	INTEL CORPORATION	发明人	YAP, HOON-YENG
分类号	B65G49/07;H01L21/677;(IPC1-7):H01L21/00	主分类号	B65G49/07
代理机构		代理人
主权项
地址

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