| 摘要 |
A photoresist adamantane-series monomer represented by the following formula (1b): €ƒ€ƒ€ƒ
wherein R 11 represents a hydrogen atom or a methyl group; R 12 , R 13 , and R 14 are the same or different from each other, each representing a hydrogen atom, an alkyl group, or a hydroxyl group and at least one of the substituents R 12 to R 14 is a hydroxyl group; X represents a connecting group; and m and n individually represent 0 or 1. |
