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发明名称
A polymer solution for nanoprint lithography to reduce imprint temperature and pressure
摘要
申请公布号
AU2003293107(A8)
申请公布日期
2004.06.23
申请号
AU20030293107
申请日期
2003.11.26
申请人
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
发明人
GUN-YOUNG JUNG;YONG CHEN;R STANLEY WILLIAMS;GANAPATHIAPPAN SIVAPACKIA
分类号
B29C35/08;B29C59/02;G03F7/00;G03F7/033;(IPC1-7):G03F7/00
主分类号
B29C35/08
代理机构
代理人
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