| 摘要 |
A photoresist copolymer comprising a monomer unit corresponding to a monomer represented by the following formula (11a) or (12a): <CHEM> wherein R<1> and R<2> are the same or different and each represents a C1-4alkyl group, and R<3> represents a hydrogen atom or methyl group; and a lactone ring-containing monomer unit. |
