| 摘要 |
A sliding means(1) with built-in moving-magnet linear motor is provided, realizing high-speed operation and much response ability of a table(3) to a stationary bed(2), and also accurate position control of the table(3) to the bed(2). With the sliding means (1) of this invention, armature windings(12) carry a three-phase current while a driving circuit is transferred to the external driver to make the bed(2) slim in construction. Thus, the sliding means(1) is reduced in overall height. A field magnet(13) of rare earth permanent magnet is effective in raising flux density, thereby providing high propulsion for the table(3). An encoder to monitor a position of the table(3) is an optical encoder(14) having an optical linear scale(15), which contributes to improvement in accurate monitoring. The construction in which the armature windings(12) connected to cords(21,22), lines, and so on are placed on the stator side has no fear of causing dust and dirt, thus realizing clean environment. <IMAGE> |
