发明名称 |
Method and apparatus for transferring a semiconductor substrate |
摘要 |
A method and apparatus for transferring a substrate is provided. In one embodiment, an apparatus for transferring a substrate includes at least one end effector. A disk is rotatably coupled to the end effector. The disk is adapted to rotate the substrate relative to the end effector. The end effector may additionally include a sensor coupled thereto. The sensor is adapted to detect an indicia of orientation of the substrate supported by the end effector. In another embodiment, a method for transferring a substrate includes rotating the substrate disposed on an end effector and detecting an indicia of orientation of the substrate.
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申请公布号 |
US6752585(B2) |
申请公布日期 |
2004.06.22 |
申请号 |
US20010882394 |
申请日期 |
2001.06.13 |
申请人 |
REIMER PETER;PATEL JAYESH |
发明人 |
REIMER PETER;PATEL JAYESH |
分类号 |
B25J9/06;B25J9/10;B25J15/08;B65G49/07;H01L21/677;H01L21/68;H01L21/687;(IPC1-7):B65G49/07 |
主分类号 |
B25J9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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