发明名称 |
Method of forming the silicon germanium base of a bipolar transistor |
摘要 |
The intrinsic base region of a bipolar transistor is formed to avoid a chemical interaction between the chemicals used in a chemical mechanical polishing step and the materials used to form the base region. The method includes the step of forming a trench in a layer of epitaxial material. After this, a base material that includes silicon and germanium is blanket deposited, followed by the blanket deposition of a layer of protective material. The layer of protective material protects the base material from the chemical mechanical polishing step.
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申请公布号 |
US6753234(B1) |
申请公布日期 |
2004.06.22 |
申请号 |
US20010994293 |
申请日期 |
2001.11.26 |
申请人 |
NATIONAL SEMICONDUCTOR CORPORATION |
发明人 |
NAEM ABDALLA ALY |
分类号 |
H01L21/331;H01L29/08;H01L29/737;(IPC1-7):H01L21/331 |
主分类号 |
H01L21/331 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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