| 摘要 |
The present invention is a coating unit for applying a coating solution on a substrate, comprising: a container enclosing the substrate; a casing for accommodating the container therein; a supply device for supplying a predetermined gas into the casing; a first exhaust pipe for exhausting an atmosphere inside the container; a second exhaust pipe for exhausting an atmosphere inside the casing; a first adjusting device which is disposed in the first exhaust pipe, for adjusting a flow rate of an atmosphere passing through the first exhaust pipe; and a second adjusting device which is disposed in the second exhaust pipe, for adjusting a flow rate of an atmosphere passing through the second exhaust pipe. According to the present invention, the second exhaust pipe is usable for adjusting the exhaust flow rate to maintain a pressure inside the casing at a positive pressure. This makes it possible to divide, with the use of the first exhaust pipe and the second exhaust pipe, the work which satisfies the conditions of exhausting the atmosphere inside the casing to maintain the pressure inside the casing at the positive pressure relative to an amount of the supplied gas and exhausting the atmosphere inside the container at a predetermined flow rate or higher to prevent the atmosphere inside the container from flowing out of the container. Thereby, the atmospheres inside the casing and the container can be controlled more easily.
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