发明名称 Optical arrangement, and method for the deflection of light beams
摘要 An optical arrangement having a light source, preferably a laser, for generating a light beam (1); at least one acoustooptical deflection device (3) for the light beam (1); and a correction device for correcting beam aberrations produced by the deflection device (3) is configured, in the interest of flexible and reliable correction of aberrations occurring because of the deflection, in such a way that the correction device comprises an adaptive optical system (2). Also described is a method for the deflection of light beams (1) with a light source, preferably a laser, for generating a light beam (1); at least one acoustooptical deflection device (3) for the light beam (1); and a correction device for correcting beam aberrations produced by the deflection device (3), in which an adaptive optical system (2) is used as the correction device.
申请公布号 US6754000(B2) 申请公布日期 2004.06.22
申请号 US20010969816 申请日期 2001.10.03
申请人 LEICA MICROSYSTEMS HEIDELBERG GMBH 发明人 ENGELHARDT JOHANN;HOFFMANN JUERGEN
分类号 G02B21/00;G02B26/06;G02F1/33;G03F7/20;(IPC1-7):G02F1/33;G02F1/11;G02B26/00;H01J5/16;B41J2/47 主分类号 G02B21/00
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