发明名称 |
Multi-layered coated substrate and method of production thereof |
摘要 |
The invention provides a multilayer-coated substrate which has recesses and projections of an accurate shape on the surface and has high heat resistance and a high degree of integration, and further provides a process for producing the same.
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申请公布号 |
US6753064(B1) |
申请公布日期 |
2004.06.22 |
申请号 |
US20000529990 |
申请日期 |
2000.04.24 |
申请人 |
NIPPON SHEET GLASS CO., LTD. |
发明人 |
NAKAMA KENICHI;SHIMMO KATSUHIDE |
分类号 |
B32B27/00;B29C43/02;B29C43/14;B29C43/36;G02B3/00;G11B7/24;G11B7/253;G11B7/26;H01L33/58;H01L33/60;(IPC1-7):G02B1/10 |
主分类号 |
B32B27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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