发明名称 Multi-layered coated substrate and method of production thereof
摘要 The invention provides a multilayer-coated substrate which has recesses and projections of an accurate shape on the surface and has high heat resistance and a high degree of integration, and further provides a process for producing the same.
申请公布号 US6753064(B1) 申请公布日期 2004.06.22
申请号 US20000529990 申请日期 2000.04.24
申请人 NIPPON SHEET GLASS CO., LTD. 发明人 NAKAMA KENICHI;SHIMMO KATSUHIDE
分类号 B32B27/00;B29C43/02;B29C43/14;B29C43/36;G02B3/00;G11B7/24;G11B7/253;G11B7/26;H01L33/58;H01L33/60;(IPC1-7):G02B1/10 主分类号 B32B27/00
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