发明名称 |
APPARATUS AND METHOD FOR MANUFACTURING AN ORGANIC ELECTROLUMINESCENCE DISPLAY |
摘要 |
An apparatus for manufacturing an organic electroluminescence display having an alignment chamber for aligning a mask having openings corresponding to a predetermined pattern with a substrate on which a first electrode layer is formed and detachably attaching the mask and the substrate. The apparatus further including a number of vacuum processing chambers for sequentially forming a number of organic material layers on the substrate attached with the mask. The apparatus also including a transfer robot for transferring the attached mask and substrate to one of the number of vacuum processing chambers and sequentially transferring it between the number of the vacuum processing chambers. |
申请公布号 |
SG104333(A1) |
申请公布日期 |
2004.06.21 |
申请号 |
SG20020003171 |
申请日期 |
2002.05.29 |
申请人 |
SONY CORPORATION |
发明人 |
TAKAO MORI;MASARU YAMAGUCHI;ISAO KAMIYAMA |
分类号 |
H05B33/10;C23C14/02;C23C14/04;C23C14/12;C23C14/56;G09F9/00;G09F9/30;H01L27/12;H01L27/32;H01L51/00;H01L51/40;H01L51/50;H01L51/56;H05B33/12;H05B33/22 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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