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发明名称
RELIABLE MODULAR, PRODUCTION QUALITY NARROW-BAND KrF EXCIMER LASER
摘要
申请公布号
IL138064(A)
申请公布日期
2004.06.20
申请号
IL19990138064
申请日期
1999.02.16
申请人
CYMER, INC.
发明人
分类号
G03F7/20;H01S3/03;H01S3/036;H01S3/08;H01S3/097;H01S3/1055;H01S3/134;H01S3/139;H01S3/225;(IPC1-7):H01S3/22
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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