PRE-TREATING METHOD FOR ENHANCING ADHESIVE FORCE OF PARYLENE POLYMERIC COATING AND APPARATUS USING THE SAME

摘要

PURPOSE: A pre-treating method for enhancing an adhesive force of a parylene polymeric coating and an apparatus using the same are provided to complement the adhesive force deterioration problem caused by the existing parylene coating. CONSTITUTION: The pre-treating method of the parylene coating comprises the steps of: (a) dipping various substrates in a mixing solution in which alkyltrialkoxysilane is added to an alcohol or alcohol mixed solvent; and (b) washing and drying a non-reacted material left after reacting using an alcohol or alcohol mixed solvent. The pre-treating method of the parylene coating comprises the steps of: injecting alkyltrialkoxysilane or a diluent thereof to a pre-treating apparatus attached to a chamber; vapor depositing under a vacuum decompression; and coating with parylene.