发明名称 |
SPATIAL LIGHT MODULATORS WITH LIGHT ABSORBING AREAS |
摘要 |
A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material. |
申请公布号 |
AU2003295983(A1) |
申请公布日期 |
2004.06.18 |
申请号 |
AU20030295983 |
申请日期 |
2003.11.25 |
申请人 |
REFLECTIVITY, INC. |
发明人 |
ANDREW, G. HUIBERS;SATYADEV, R. PATEL;ROBERT, M. DUBOC |
分类号 |
B81B3/00;B81B7/04;G02B26/08 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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