HEAT TRANSPORT DEVICE, METHOD FOR MANUFACTURING THE SAME AND ELECTRONIC DEVICE FOR REDUCING GAS GENERATION

摘要

PURPOSE: A heat transport device, a method for manufacturing the same, and an electronic device are provided to prevent the occurrence of residual gas or reduce an amount of gas generation. CONSTITUTION: A silicon substrate(21A) is processed by dry-etching to form grooves or prominence and depression. Coating treatment is applied to a wall surface of a wick part or inner surface of a passage with ion implantation, thermal oxidation, or steam oxidation. The surface is polished by dry-etching or plasma treatment. Coating treatment is applied to the desired part of the surface by using a mask(22). A thin film is deposited on a glass substrate(21B). The silicon substrate is bonded to the glass substrate.