| 摘要 |
PURPOSE: A heat treatment apparatus and a heat treatment method are provided to prevent failure of a heat-treated object in quality due to the drop of solids made of sublimating components by using a trap made of permeable porous layer. CONSTITUTION: A heat treatment apparatus includes a stage(1) for loading a heat-treated object(W) coated with coating solutions, a heating unit(2) for heating the object, a cover part, and a trap. The cover part(3) includes a body(3a) and an upper plate(3b), and an exhaust port(4). The exhaust port is used for exhausting the gas generated from the coating solutions due to heating of the object. The trap(5) is installed between the stage and the upper plate to prevent the drop of solids made of the gas. The exhaust port is installed higher than the trap. The trap includes a permeable porous layer.
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