| 摘要 |
PROBLEM TO BE SOLVED: To efficiently and simply manufacturing a metal oxide fine particle. SOLUTION: In the manufacturing method, the metal oxide fine particle is obtained by heating a mixture prepared by mixing a gaseousβ-diketonate metallic complex with an oxygen-containing gas or oxygen, a mixture prepared by mixing a solution of theβ-diketonate metallic complex with the oxygen-containing gas or oxygen or a mixture prepared by mixing a vapor containing a gaseousβ-diketonate metallic complex obtained by vaporizing the solution of theβ-diketonate metallic complex with the oxygen-containing gas or oxygen to decompose the gaseousβ-diketonate metallic complex by heating. Or in the manufacturing method, the metal oxide fine particle is obtained by mixing theβ-diketonate metallic complex (a), the solution of theβ-diketonate metallic complex (b) with the oxygen-containing gas or oxygen, heating the mixture to turn theβ-diketonate metallic complex in the solution to the gaseous state and decomposing the gaseousβ-diketonate metallic complex (a) and (b) by heating. COPYRIGHT: (C)2004,JPO
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