摘要 |
PROBLEM TO BE SOLVED: To obtain a process for manufacturing a liquid ejection head, a liquid ejection head, and a liquid ejector applicable to a thermal ink jet printer in which reliability can be ensured by employing aluminium, or the like, added with silicon or copper in the wiring pattern. SOLUTION: An etching stopper layer 3 is formed previously on a heating element 2 in order to protect the heating element 2 against dry etching of a wiring pattern 4. COPYRIGHT: (C)2004,JPO
|