| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To remove an influence of electrical noise in an X-ray analysis using a low energy characteristic radiation. <P>SOLUTION: In the X-ray analysis using the low energy characteristic radiation, a signal with the reduced influence due to the electrical noise is found by respectively finding a detection signal including the low energy characteristic radiation and a noise component and a detection signal including only the noise component and subtracting the detection signal including only the noise component from the detection signal including the low energy characteristic radiation and the noise component. The X-ray analysis is provided with a first measurement process for measuring the characteristic radiation on an optical path between an analysis sample and an X-ray detector in a vacuum state, a second measurement process for measuring a residual characteristic radiation absorbing the low energy X-ray on the optical path and a calculation process for subtracting a signal measured in the second measurement process from a signal measured in the first measurement process. <P>COPYRIGHT: (C)2004,JPO</p> |
