发明名称 WORK TRANSFER DEVICE AND WORK TREATMENT DEVICE EQUIPPED WITH THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a compact work transfer device that has a cooling function of a work as well as a buffer function. <P>SOLUTION: A cooling plate 91 compulsorily cooled by a cooling medium is arranged in the transfer route of the work. A magazine rack 101, having a side frame 113 located on both sides of the cooling plate 91 and extending in vertical direction, to the side frame of which, a work receptacle 114 engaging with the lower side of the side edge part of the work is fitted, is made to freely elevate by an elevation mechanism 102. The work, placed on and cooled by the cooling plate 91, is stocked at the upper space of the cooling plate 91 by being supported by the work receptacle 114 by the lifting of the magazine rack 101. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004171845(A) 申请公布日期 2004.06.17
申请号 JP20020334316 申请日期 2002.11.18
申请人 SEIKO EPSON CORP 发明人 NAKAMURA SHINICHI
分类号 G02B5/20;B65G49/06;H01L21/677;H01L21/68;H01L51/50;H05B33/10;H05B33/14;(IPC1-7):H05B33/10 主分类号 G02B5/20
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