| 摘要 |
PROBLEM TO BE SOLVED: To provide an image pick-up method of a scanning inspection device for, especially, picking up images during conveyance and continuously and indirectly exposing a subject, which is provided with a periodical characteristic, to quickly determined good or bad. SOLUTION: At least one image capture device is provided to pick up an image during conveyance, and captures overlapped images of the subject provided with a periodical characteristic, and continuous indirect exposure is performed to generate overlapped images of unclear, and finally, a relative difference in the overlapped image is taken out to quickly determine good or bad of the subject. COPYRIGHT: (C)2004,JPO
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