FERROELECTRIC CAPACITOR AND PROCESS FOR ITS MANUFACTURE

摘要

A method of forming a capacitor, comprises the steps of (a) forming a matrix of ferroelectric capacitor elements on a substrate, (b) forming a CAP layer over the ferroelectric capacitor elements, and (c) etching the CAP layer to a more uniform thickness. Also, a capacitor comprises a substrate layer, a matrix of ferroelectric capacitor elements including a first electrode layer substantially fixed relative to the substrate, a second electrode layer, and a ferroelectric layer sandwiched between the first and second electrode layers; a shoulder layer extending from the substrate to the matrix; and a CAP layer etched to have substantially constant thickness covering sides of the matrix extending beyond the substrate.