发明名称 Laser machining method
摘要 A laser machining method for machining a workpiece by applying a laser beam thereto, comprises a protective film coating step of coating a surface to be machined, of the workpiece with a protective film; a laser beam shining step of applying a laser beam to the workpiece through the protective film; and a protective film removal step of removing the protective film after completion of the laser beam shining step.
申请公布号 US2004112880(A1) 申请公布日期 2004.06.17
申请号 US20030721234 申请日期 2003.11.26
申请人 SEKIYA KAZUMA 发明人 SEKIYA KAZUMA
分类号 B23K26/18;B23K26/00;B23K26/03;B23K26/08;B23K26/38;B23K26/40;B23K101/40;H01L21/301;H01L21/68;H01L21/78;(IPC1-7):B23K26/38 主分类号 B23K26/18
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