INTERFEROMETRIC SYSTEM WITH REDUCED VIBRATION SENSITIVITY AND RELATED METHOD
摘要
<p>A source module (12) generates mutually orthogonally polarized beams of light as emanating from two spatially separated point sources (Sv, Sw) for use in a phase shifting interferometer.</p>
申请公布号
WO2004051183(A1)
申请公布日期
2004.06.17
申请号
WO2003US38005
申请日期
2003.11.26
申请人
TROLOGY LLC;SZWAYKOWSKI, PIOTR;BUSHROE, FREDERICK, N.;CASTONGUAY, RAYMOND, J.
发明人
SZWAYKOWSKI, PIOTR;BUSHROE, FREDERICK, N.;CASTONGUAY, RAYMOND, J.
