| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate alignment system which is small in the size of the system, is short in manufacturing time, and is advantageous for manufacturing of large-area liquid crystal display elements of a high yield and a manufactured method. SOLUTION: The substrate alignment system is constituted to include a base frame 100 which constitutes appearance, a lower chamber unit 220 which is attached to the base frame and an upper chamber unit 210 which is situated on the upper side of the lower chamber unit in a free state from the base frame, chamber moving means 310, 320, 330, 340, and 350 which are disposed at the base frame and vertically move the upper chamber unit, an upper stage 230 and lower stage 240 which are respectively disposed in the inner spaces of the respective chamber units and fix a pair of the substrates, and sealing means 224 and 250 which are disposed on the surface of at least either one chamber unit and seal the spaces mounted with the respective stages and the outer spaces thereof from each other when the respective chamber units are coupled to each other. COPYRIGHT: (C)2004,JPO |
